Aluminum Conductor Line Corrosion

21st International Reliability Physics Symposium Pub Date : 1983-04-01 DOI:10.1109/IRPS.1983.361960

V. Bhide, J. M. Eldridge

引用次数: 1

Abstract

Effects of P2O5 concentration on the surface conductivity of Phospho Silicate Glass (PSG) films and the attendant corrosion of Al conductor lines on the PSG was investigated using various Temperature-Humidity-Bias conditions. These results will be presented, along with those obtained using various techniques to increase the passivity of the metal, PSG surface modification and conformal die coating.

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铝导体线路腐蚀

在不同的温度-湿度偏置条件下，研究了P2O5浓度对磷硅酸盐玻璃(PSG)薄膜表面电导率的影响以及由此引起的PSG上铝导体线的腐蚀。这些结果将与使用各种技术获得的结果一起呈现，以增加金属的钝化性，PSG表面改性和保形模具涂层。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

21st International Reliability Physics Symposium

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