A Sensing element for a high-precision micromechanical LL-type gyroscope

Abstract

The paper presents a closed double-frame architecture sensing element (SE) designed for a high-precision micromechanical gyroscope (MMG). The SE was realized with the use of a silicon-on-glass (SOG) process. We have experimentally shown the possibility of anti-phase excitation of primary oscillations of inertial masses, tuning of the resonant frequency of inertial mass suspension along the axis of secondary oscillations to get matched-mode. The predicted bias instability (BI) of the MMG formed by the sensing element and modern ASIC is estimated at 1°/h.