Formation of nanocrystalline BaTiO3 thin films by pulsed laser deposition

Abstract

The paper shows the experimental results of the substrate temperature effect on the morphological and electro-physical parameters of nanocrystalline BaTiO3 films fabricated by pulsed laser deposition. It was found increasing in the substrate temperature from 300 °C to 600 °C results in decreasing in surface roughness from (6.1±0.6) nm to (0.8±0.1) nm and increasing in the films grain size from (39.1±3.1) nm to (212.1± 17.2) nm. Increasing in the substrate temperature leads to a change in electro-physical parameters: the concentration of charge carriers increases from (1.85±0.16)×1013 cm-3 to (2.77±0.25)×1013 cm-3, the mobility of charge carriers decreases from (10.1±0.9) cm2/(V·s) to (7.2±0.6) cm2/(V·s), and the resistivity of the films changes insignificantly from (3.4±0.2)×103 Ω·cm to (3.1±0.2)×103 Ω·cm under increase in the temperature from 300 °C to 600 °C. The obtained results make it possible to get BaTiO3 films with target parameters, which can be used to develop promising lead-free energy harvesters for alternative energy devices.