Adapting a cMUT transducer to detect acoustic emissions

D. Ozevin, S. Pessiki, D. Greve, I. Oppenheim
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引用次数: 4

Abstract

Acoustic emissions are ultrasonic pulses produced in solids when irreversible damage, such as material yielding or crack extension, occurs under mechanical loading. We report on the design, fabrication, and experimental demonstration of a cMUT transducer specifically designed for measurement of acoustic emission events by detecting ultrasonic waves in the 100 kHz to 1 MHz range. The cMUT transducer is intended to replace the commonly used underdamped resonant PZT transducer. In this novel application the ultrasonic energy is coupled to the substrate and the motion of the substrate relative to the supended diaphragm provides an electrical signal. This application requires a very different device design, underdamped and lower in resonant frequency than a cMUT intended for high frequency imaging. We report here the engineering of the quality factor by appropriate spacing of the etch release holes and the fabrication of transducers with multiple resonant frequencies on the same chip. We will also report the detection of actual acoustic emission events and we will compare the cMUT transducers with conventional PZT transducers. Keywords-component; capacitive, MEMS, acoustic emission
调整cMUT换能器来检测声发射
声发射是固体在机械载荷作用下发生不可逆损伤(如材料屈服或裂纹扩展)时产生的超声波脉冲。我们报告了一种cMUT换能器的设计、制造和实验演示,该换能器专门设计用于通过检测100 kHz至1 MHz范围内的超声波来测量声发射事件。cMUT换能器旨在取代常用的欠阻尼谐振PZT换能器。在这种新颖的应用中,超声波能量耦合到衬底上,衬底相对于悬挂的隔膜的运动提供了一个电信号。这种应用需要一个非常不同的器件设计,欠阻尼和谐振频率低于用于高频成像的cMUT。本文报告了通过适当的蚀刻释放孔间距和在同一芯片上制造具有多个谐振频率的换能器来实现质量因子的工程设计。我们还将报告实际声发射事件的检测,并将cMUT换能器与传统PZT换能器进行比较。Keywords-component;电容,MEMS,声发射
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