Ripple formation at laser ablation of chromium thin film

K. Regelskis, G. Račiukaitis, P. Gečys
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Abstract

Ablation characteristics of chromium thin film on a glass substrate by nanosecond laser pulses were investigated. The laser beam was tightly focused through the glass substrate to a stripe-like spot using the acylindrical lens. The metal was removed only by the central part of the laser beam, where local laser fluence exceeded the well-defined ablation threshold. Formation of a wide area cleaned by the series of laser pulses caused some side effects. The stripe ablated by a single laser pulse had sharp edges on both sides, while the partially overlapping pulses formed a wide stripe with a complicated structure made of the remaining metal. Regular structures, ripples, were developed when laser fluence was slightly above the threshold and the shift between pulses was less than a half width of the line ablated by a single laser pulse. The ripples were located periodically (~4 &mgr;) and were orientated perpendicularly to the long axis of the beam spot (in parallel to the laser pulse shift direction). Their direction did not depend on the laser beam polarization. Different models of the ripple formation in the thin metal film were considered, and instability of the moving vapor-liquid- solid contact line during evaporation of thin liquid films appear to be the most appropriate process responsible for the observed phenomena. Regular gratings with the unlimited line length can be produced by using the technique.
激光烧蚀铬薄膜时波纹的形成
研究了纳秒激光脉冲对玻璃基板上铬薄膜的烧蚀特性。利用非圆柱形透镜,激光束通过玻璃基板紧密聚焦到一个条纹状的点。金属仅被激光束的中心部分去除,在那里,局部激光能量超过了明确的烧蚀阈值。一系列激光脉冲清洗后形成的大面积区域产生了一些副作用。单个激光脉冲烧蚀的条纹两侧边缘锋利,而部分重叠的脉冲则形成了由剩余金属组成的复杂结构的宽条纹。当激光能量略高于阈值时,脉冲之间的位移小于单个激光脉冲烧蚀线的一半宽度时,就会形成规则的结构,即波纹。波纹周期性地定位(~4 &mgr;),并垂直于光束光斑的长轴(平行于激光脉冲位移方向)。它们的方向不依赖于激光束的偏振。考虑了金属薄膜中波纹形成的不同模型,认为在金属薄膜蒸发过程中移动的气-液-固接触线的不稳定性是造成所观察到的现象的最合适的过程。利用该技术可以制作出线长不受限制的规则光栅。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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