Fabrication of TiNi shape memory alloy micro-structures and ceramic micro-mold by LIGA-MA-SPS process

Abstract

Metals and ceramics are becoming increasing of importance to microsystem in reproduction and molding techniques because of the mechanical and physical properties. In the study, we have developed a new process using LIGA mold which is able to cast a microstructure of alloys or ceramics using spark plasma sintering (SPS) machine. In addition, the alloys are made by mechanical alloying (MA) method using a combination of different metal powder. A micro spring structure of Ti-Ni-Cu shape memory alloy powder was produced by way of trial. Finally, it was found that the LIGA-MA-SPS process is an effective technique.