Influence of Film Thickness on Electrical and Optical Properties of Vanadium Dioxide Thin Films for Smart Window Coating Application

H. Hashim, Muhammad Hazim Raselan, Ibrahim Mohd Yazid, S. S. Shariffudin, P. S. Mohamad Saad
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Abstract

Vanadium dioxide (VO_2) is one of the material for smart window application due to its transition temperature that close to nearest room temperature from 20°C to 30°C. The aim of this research is to study the effect of VO_2 thin films with different spin coating speeds during the deposition process which change the thin film thickness at varies spin coating speed. In this work, quartz substrates were used with 2.0 cm x 2.0 cm dimension. The VO_2 solution was prepared by sol-gel method by mixing the vanadium oxytripropoxide with isopropanol, while VO2 thin film was fabricated using spin coating technique. Five samples were used to characterize the different of spin coating speeds at 1000 rpm, 1250 rpm, 1500 rpm, 1750 rpm and 2000 rpm. The samples of VO_2 thin films produce a different characterization pattern of electrical and optical properties. Samples characterization process were performed using I-V measurements and UV-Visible spectrophotometer. The absorbance and transmittance of VO_2 thin films were checked using UV-Visible spectrophotometer for the optical properties of thin films, while the I-V measurements for the current and voltage of each sample. The result for 1000 rpm sample shows the highest thickness with less grain and high conductivity. As a conclusion, sample with the highest thickness film produced thin film with a good electrical and optical properties.
薄膜厚度对智能窗涂层中二氧化钒薄膜电学和光学性能的影响
二氧化钒(VO_2)由于其从20°C到30°C的转变温度接近最接近室温,是智能窗应用的材料之一。本研究的目的是研究不同自旋镀膜速度对VO_2薄膜沉积过程中膜厚的影响。在这项工作中,石英衬底的尺寸为2.0 cm × 2.0 cm。采用溶胶-凝胶法制备了氧化三丙醇钒和异丙醇溶液,采用自旋镀膜技术制备了VO2薄膜。用5个样品在1000 rpm、1250 rpm、1500 rpm、1750 rpm和2000 rpm的转速下表征了不同的旋转涂层速度。VO_2薄膜样品产生了不同的电学和光学特性表征模式。样品的表征过程采用I-V测量和紫外可见分光光度计进行。用紫外可见分光光度计测定了VO_2薄膜的吸光度和透射率,用I-V测定了各样品的电流和电压。结果表明,当样品转速为1000 rpm时,样品厚度最高,晶粒少,电导率高。综上所述,薄膜厚度最大的样品制备的薄膜具有良好的电学和光学性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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