The stability of metallized, thin, flexible III–V structures for high temperature applications and wafer bonding

T. Bai, B. Beekley, M. Jackson, M. Goorsky
{"title":"The stability of metallized, thin, flexible III–V structures for high temperature applications and wafer bonding","authors":"T. Bai, B. Beekley, M. Jackson, M. Goorsky","doi":"10.1109/PVSC.2015.7356355","DOIUrl":null,"url":null,"abstract":"The stability of thin, flexible III-V layers / solar cells with metallization was addressed. Reduced cell thickness (reduced weight) places added constraints on metallization sequences, thicknesses, and thermal budgets for these cells. We subjected a structure of a thin (few μm) III-V layers (the focus here is on InP-based structures) with metallization backing (Au, Ni, and Cu-based metallizations, several μm thick) to annealing at 200 °C, 300 °C, or 400 °C for up to a twelve hours. X-ray diffraction is a particularly useful technique as measurements from the solar cell (semiconductor) side of the stack also reveals the metallization diffraction peaks and hence any reaction byproducts. This is due to the beam penetration through the few μm thick cell layers. After 200 °C for twelve hours, x-ray diffraction and transmission electron microscopy indicate reactions between the metal layers in the stack but the semiconductor is unchanged. After 300 °C, twelve hours, there is more extensive intermetallic compound formation. However, after annealing at 400 °C, twelve hours, the III-V layer is entirely consumed. In contrast, when much thicker cells / semiconductor layers are subject to similar annealing conditions, there may not be a significant impact on performance because only a few μm of the total cell thickness is consumed. When the total thickness is only a few μm, however, the reaction between the metal contact layer and the semiconductor leads to consumption of the entire device. These results demonstrate that (i) the total cell thickness is important when considering contact-semiconductor interactions at elevated operating or processing temperatures and (ii) x-ray diffraction through the thin cell provides a detailed assessment of reactions; it can be utilized for any combination of thin film solar cell and metallization.","PeriodicalId":427842,"journal":{"name":"2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-06-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE 42nd Photovoltaic Specialist Conference (PVSC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PVSC.2015.7356355","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract

The stability of thin, flexible III-V layers / solar cells with metallization was addressed. Reduced cell thickness (reduced weight) places added constraints on metallization sequences, thicknesses, and thermal budgets for these cells. We subjected a structure of a thin (few μm) III-V layers (the focus here is on InP-based structures) with metallization backing (Au, Ni, and Cu-based metallizations, several μm thick) to annealing at 200 °C, 300 °C, or 400 °C for up to a twelve hours. X-ray diffraction is a particularly useful technique as measurements from the solar cell (semiconductor) side of the stack also reveals the metallization diffraction peaks and hence any reaction byproducts. This is due to the beam penetration through the few μm thick cell layers. After 200 °C for twelve hours, x-ray diffraction and transmission electron microscopy indicate reactions between the metal layers in the stack but the semiconductor is unchanged. After 300 °C, twelve hours, there is more extensive intermetallic compound formation. However, after annealing at 400 °C, twelve hours, the III-V layer is entirely consumed. In contrast, when much thicker cells / semiconductor layers are subject to similar annealing conditions, there may not be a significant impact on performance because only a few μm of the total cell thickness is consumed. When the total thickness is only a few μm, however, the reaction between the metal contact layer and the semiconductor leads to consumption of the entire device. These results demonstrate that (i) the total cell thickness is important when considering contact-semiconductor interactions at elevated operating or processing temperatures and (ii) x-ray diffraction through the thin cell provides a detailed assessment of reactions; it can be utilized for any combination of thin film solar cell and metallization.
金属化,薄,柔性III-V结构的稳定性,适用于高温应用和晶圆键合
研究了金属化薄柔性III-V层/太阳能电池的稳定性。电池厚度的减小(重量的减小)对这些电池的金属化顺序、厚度和热收支增加了限制。我们将薄(几μm) III-V层的结构(这里的重点是inp基结构)与金属化背景(Au, Ni和cu基金属化,几μm厚)在200°C, 300°C或400°C下退火长达12小时。x射线衍射是一种特别有用的技术,因为从堆栈的太阳能电池(半导体)方面的测量也揭示了金属化衍射峰,因此任何反应副产物。这是由于光束穿透了几μm厚的电池层。经过200°C 12小时后,x射线衍射和透射电子显微镜显示堆叠中的金属层之间发生了反应,但半导体没有变化。在300℃,12小时后,金属间化合物的形成更为广泛。然而,在400℃退火12小时后,III-V层完全消耗。相反,当更厚的电池/半导体层受到类似的退火条件时,可能不会对性能产生重大影响,因为只消耗了电池总厚度的几μm。然而,当总厚度仅为几μm时,金属接触层与半导体之间的反应会导致整个器件的消耗。这些结果表明:(i)当考虑在升高的操作或加工温度下的接触-半导体相互作用时,电池的总厚度是重要的;(ii)通过薄电池的x射线衍射提供了对反应的详细评估;它可以用于薄膜太阳能电池和金属化的任何组合。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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