Timing and synchronization of solid state pulsed power modules (SSPPM) for excimer laser applications

Abstract

In certain applications for excimer lasers, it is critical to maintain the timing of a solid state pulsed power module (SSPPM) such that the pulsed output of the laser can be synchronized to another external event. In some cases, this synchronization must be held to times in the order of 10 ns or less. Since the operating voltage range of these magnetic modulators must vary (by up to a factor of two) in order to adjust the laser output energy, the throughput delay can also vary significantly. This timing must also be maintained over other possible laser operating conditions and scenarios, including various repetition rates, duty cycles, etc. External factors, such as cooling water temperature and flow rate, air temperature, etc. can also impact the system timing. Data are presented detailing the contribution of each potential item in the timing sequence of these modulators as they impact the overall system timing jitter and drift. Design details are also discussed as to how these issues are mitigated and minimized so as to reduce their effect and meet the overall system timing requirements.