Epitaxial layer CdHgTe stress influence on diffusion impurities during creation of photodetectors

L. Monastyrskii
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Abstract

We have investigated changing of diffusion migration through thin heteroepitaxial layers of cadmium-mercury-telluride under stress influence, which have created by differences between thermal extension coefficients of layers and substrate. We have analyzed by numerical experiment cases homogeneous and exponential mechanical stress in 2 and 3 layers structure. It was studied the time evolution of diffusion concentration profiles of impurity through epitaxial layers under influence of different mechanical stresses.
外延层CdHgTe应力对光电探测器制备过程中杂质扩散的影响
我们研究了镉汞碲化物异质外延薄层在应力影响下扩散迁移的变化,这是由于层与衬底的热延伸系数不同造成的。通过数值实验分析了2层和3层结构的均匀力学应力和指数力学应力。研究了不同机械应力作用下杂质通过外延层扩散浓度曲线的时间演化规律。
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