Totally Silicided (TOSI) Gates as an evolutionary metal gate solution for advanced CMOS technologies

Abstract

In this paper, we show that totally silicided (TOSI) gate electrodes offer an interesting and industrially viable option for the integration of metal gate electrodes in advanced CMOS technologies as their integration requires only few modifications with respect to a CMOS standard flow. Moreover, the use of NiSi gives access to an electrode with a tunable mid-gap work function. The potential of TOSI-gate devices is demonstrated by integration and device results including fully operational SRAM cells and reliability data