Intrinsic reliability characterization for stand-alone MEMS switch technology

Abstract

This work presents a device level reliability (DLR) characterization for the Analog Devices proprietary metal contact microelectromechanical systems (MEMS) switch technology. Stand-alone device characterizations in both hold-down and toggle operation modes are described. An alternative operation mode to analyze is the so called “hot switching”. The switch pull-in voltage and the contact resistance are the main physical parameters that have been analyzed. This DLR characterization methodology can be considered a first step towards a standard that will be performed in parallel to typical product qualifications in order to assess the device long term reliability.