Space-grown SI-GaAs and its application

N. Chen, X. Zhong, Mian Zhang, Lan-ying Lin
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Abstract

A semi-insulating GaAs single crystal ingot was grown in a recoverable satellite, within a specially designed pyrolytic boron nitride crucible, in a power-travelling furnace under microgravity. The crystal was characterized systematically and was used in fabricating low noise field effect transistors and analogue switch integrated circuits by the direct ion-implantation technique. All key electrical properties of these transistors and integrated circuits have surpassed those made from conventional earth-grown gallium arsenide. This result shows that device-grade space-grown semiconducting single: crystal has surpassed the best terrestrial counterparts. Studies on the correlation between SI-GaAs wafers and the electronic devices and integrated circuits indicate that the characteristics of a compound semiconductor single crystal depends fundamentally on its stoichiometry.
空间生长SI-GaAs及其应用
半绝缘砷化镓单晶锭生长在一个可回收的卫星,在一个特别设计的热解氮化硼坩埚,在微重力下的动力旅行炉。对该晶体进行了系统的表征,并通过直接离子注入技术用于制造低噪声场效应晶体管和模拟开关集成电路。这些晶体管和集成电路的所有关键电性能都超过了传统的土产砷化镓。这一结果表明,器件级空间生长半导体单晶已经超越了最好的地面同类产品。SI-GaAs晶圆与电子器件和集成电路的相关性研究表明,化合物半导体单晶的特性从根本上取决于其化学计量学。
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