{"title":"Structural characteristics of thermally grown SiO/sub 2/ prepared by a home made furnace","authors":"A. Mat, H. Musa, B. Y. Majlis","doi":"10.1109/SMELEC.2000.932463","DOIUrl":null,"url":null,"abstract":"The structural differences between thermally grown SiO/sub 2/ prepared using three different gas mixtures was studied using infrared measurements, refractive index measurements and selective etching techniques. The data shows that the highest degree of porosity is found in materials grown in an ammonia atmosphere.","PeriodicalId":359114,"journal":{"name":"ICSE 2000. 2000 IEEE International Conference on Semiconductor Electronics. Proceedings (Cat. No.00EX425)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-11-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ICSE 2000. 2000 IEEE International Conference on Semiconductor Electronics. Proceedings (Cat. No.00EX425)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMELEC.2000.932463","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
The structural differences between thermally grown SiO/sub 2/ prepared using three different gas mixtures was studied using infrared measurements, refractive index measurements and selective etching techniques. The data shows that the highest degree of porosity is found in materials grown in an ammonia atmosphere.