Structural characteristics of thermally grown SiO/sub 2/ prepared by a home made furnace

A. Mat, H. Musa, B. Y. Majlis
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Abstract

The structural differences between thermally grown SiO/sub 2/ prepared using three different gas mixtures was studied using infrared measurements, refractive index measurements and selective etching techniques. The data shows that the highest degree of porosity is found in materials grown in an ammonia atmosphere.
自制炉热生长SiO/ sub2 /的结构特性
采用红外测量、折射率测量和选择性蚀刻技术研究了三种不同气体混合物制备的热生长SiO/ sub2 /的结构差异。数据显示,在氨气环境中生长的材料气孔率最高。
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