Micromanipulation - as an assembly tool for three-dimensional photonic crystals

K. Aoki, Hidetoshi Miyazaki, H. Hirayama, K. Inoshita, T. Baba, K. Sakoda, N. Shinya, Y. Aoyagi
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引用次数: 1

Abstract

One of the desired applications of photonic crystals is an optical integrated circuit which is equivalent to a highly integrated circuit of an electronic device. Electronic devices have adopted a three-dimensional (3D) arrangement of elements and wiring in order to formulate highly integrated components. To bring a similar success of the present electronic devices to the field of optoelectronics, the development of fabrication technologies of 3D photonic crystals must be undertaken. If all the waveguides and elements are supposed to be arranged in one 2D plane, high integration cannot be desired; waveguides will become unnecessarily long and complicated. Furthermore, realization of integrated optical circuits means that we need to be able to lay out elements made of various materials suitable to each purpose at exact positions as we designed, and connect them with intricate waveguides. The materials of the crystals are supposed to be semiconductors if we want to add active elements such as lasers and LEDs. There have been no technologies which fulfill all these requirements. Recently we have introduced a novel fabrication technology for a semiconductor 3D photonic crystal by uniting integrated circuit (IC) processing technology with micromanipulation. Four- to twenty-layered (five periods) crystals for infrared wavelength (3-4.5 micrometer) were integrated at predetermined positions on a chip with a structural error of within 50 nm. Observation of the PBG confirmed the precision of our technique. A crystal with a controlled defect was also arranged on the same chip. Numerical calculations revealed that a transmission peak observed at the upper frequency edge of the bandgap originated from the excitation of a resonant guided mode in the defective layers. This technology offers immense potential in becoming a breakthrough in the production of optical wavelength photonic crystal device. In the field of photonic crystals, our method is considered as a very eccentric approach. However, when we widely overlook the industrial production lines, it turns out that manipulation technique has already deeply taken in the field. For example, mass production of the high-density mounting circuits for mobile computing products are enabled by a manipulation robot's ultra high-speed assembly based on image recognition. In the case of photonic crystal devices, things are not easy as the case of electronic devices, because assembly in the micro world is quite different from what we experience in the macroscopic scale; surface effects and electrostatic force rule over more strongly than inertia. Moreover, part size and accuracy required for photonic crystals are about 1000 times smaller in scale of that required in electronic products. Because of these difficulties, an operator operates micromanipulation system to assemble elements one by one for now, thus not a few people claim that our technique is just a toy for research. However, if the systems for image recognition and feedback in micro and nano scales are established, mass production of photonic crystal devices by automatic manipulation is not a dream. Also the technology which can perform stable assembly in these scales is indispensable not only to the field of photonic crystal device but to the field of the electron device and micromachining in which miniaturization is progressing at an increasing speed.
微操作-三维光子晶体的装配工具
光子晶体的理想应用之一是光学集成电路,相当于电子器件的高度集成电路。电子设备采用三维(3D)排列元件和布线,以制定高度集成的组件。为了使现有的电子器件在光电子领域取得类似的成功,必须进行三维光子晶体制造技术的开发。如果所有的波导和元件都被安排在一个二维平面上,高集成度是不可能的;波导将变得不必要的长和复杂。此外,集成光学电路的实现意味着我们需要能够在我们设计的精确位置上布置适合每种用途的各种材料制成的元件,并将它们与复杂的波导连接起来。如果要加入激光和led等有源元素,晶体的材料应该是半导体。目前还没有一种技术能够满足所有这些要求。最近,我们介绍了一种将集成电路(IC)加工技术与微操作相结合的半导体三维光子晶体制造新技术。红外波长(3-4.5微米)的四到二十层(五个周期)晶体在芯片上的预定位置集成,结构误差在50 nm以内。对PBG的观测证实了我们技术的精确性。在同一芯片上还放置了具有可控缺陷的晶体。数值计算表明,在带隙的高频率边缘观测到的透射峰是由缺陷层中共振引导模式的激发引起的。该技术在光波光子晶体器件的生产中具有巨大的突破潜力。在光子晶体领域,我们的方法被认为是一种非常古怪的方法。然而,当我们广泛忽视工业生产线时,却发现操纵技术早已深入到这一领域。例如,基于图像识别的操作机器人超高速装配实现了移动计算产品高密度安装电路的量产。对于光子晶体器件来说,事情并不像电子器件那样容易,因为微观世界的组装与我们在宏观尺度上所经历的组装有很大的不同;表面效应和静电力的作用比惯性更强。此外,光子晶体所需的零件尺寸和精度比电子产品所需的尺寸小1000倍左右。由于这些困难,目前由操作员操作微操作系统将元件一个一个地组装起来,因此不少人声称我们的技术只是研究的玩具。然而,如果建立了微纳米尺度的图像识别和反馈系统,通过自动操作实现光子晶体器件的批量生产就不是梦想了。在这种尺度下进行稳定组装的技术,不仅对光子晶体器件,而且对日益小型化的电子器件和微机械加工领域都是必不可少的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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