Development of monolithic CMOS-SAW oscillator

Abstract

In recent years, miniaturization and high accuracy of mobile communication systems have become essential. Because of good phase noise performance, the SAW clock has become a viable option for data transmission. However, a SAW oscillator is usually made up of a SAW device and a CMOS-IC separately, and this large size limits its use in mobile communication systems. This paper covers the development of the smallest monolithic SAW oscillator using thin film ZnO deposited on a CMOS-IC. The SAW device and the IC have been combined into a single unit, and the total thickness is nearly the same as the IC.