"A sub-0.25/spl mu/m symmetric super self-aligned gate hjfet witn reduced gate fringing capacitance fabricated using electroless au plating and collimated sputtering"
S. Wada, M. Tokushima, M. Fukaishi, N. Matsuno, H. Yano, H. Hida
{"title":"\"A sub-0.25/spl mu/m symmetric super self-aligned gate hjfet witn reduced gate fringing capacitance fabricated using electroless au plating and collimated sputtering\"","authors":"S. Wada, M. Tokushima, M. Fukaishi, N. Matsuno, H. Yano, H. Hida","doi":"10.1109/DRC.1994.1009449","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":244069,"journal":{"name":"52nd Annual Device Research Conference","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"52nd Annual Device Research Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DRC.1994.1009449","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}