C. Summitt, Sung-Yuen Wang, L. Johnson, Melissa Zaverton, Tao Ge, T. Milster, Y. Takashima
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引用次数: 2
Abstract
We have developed a hybrid lithography process necessary to fabricate a vertical optical coupler and an array of waveguide structures using the same buffer coat material on a single substrate. A virtual vernier scale built into the process enables precise alignment of both structures.
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