Proposal of multi-wavelength integration of athermal GaAs VCSEL array with thermally actuated cantilever structure

Abstract

We propose a multi-wavelength and athermal VCSEL array with thermally-actuated cantilevers. The lithography-defined cantilever structure enables on-chip multi-wavelength integration. The experiment shows the wavelength spacing of 20 nm for 2-ch VCSEL array with different cantilever lengths.