SiC power devices — Present status, applications and future perspective

M. Ostling, R. Ghandi, C. Zetterling
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引用次数: 187

Abstract

Silicon carbide (SiC) semiconductor devices for high power applications are now commercially available as discrete devices. Recently Schottky diodes are offered by both USA and Europe based companies. Active switching devices such as bipolar junction transistors (BJTs), field effect transistors (JFETs and MOSFETs) are now available on the commercial market. The interest is rapidly growing for these devices in high power and high temperature applications. The main advantages of wide bandgap semiconductors are their very high critical electric field capability. From a power device perspective the high critical field strength can be used to design switching devices with much lower losses than conventional silicon based devices both for on-state losses and reduced switching losses. This paper reviews the current state of the art in active switching device performance for both SiC and GaN. SiC material quality and epitaxy processes have greatly improved and degradation free 100 mm wafers are readily available. The SiC wafer roadmap looks very favorable as volume production takes off. For GaN materials the main application area is geared towards the lower power rating level up to 1 kV on mostly lateral FET designs. Power module demonstrations are beginning to appear in scientific reports and real applications. A short review is therefore given. Other advantages of SiC is the possibility of high temperature operation (> 300 °C) and in radiation hard environments, which could offer considerable system advantages.
碳化硅功率器件的现状、应用与展望
用于高功率应用的碳化硅(SiC)半导体器件现在作为分立器件在商业上可用。最近,美国和欧洲的公司都提供肖特基二极管。有源开关器件,如双极结晶体管(BJTs),场效应晶体管(jfet和mosfet)现在在商业市场上可用。对这些器件在高功率和高温应用中的兴趣正在迅速增长。宽禁带半导体的主要优点是具有很高的临界电场能力。从功率器件的角度来看,高临界场强可用于设计比传统硅基器件具有更低损耗的开关器件,无论是导通损耗还是降低开关损耗。本文综述了碳化硅和氮化镓有源开关器件性能的现状。SiC材料质量和外延工艺得到了极大的改善,并且可以很容易地获得无降解的100毫米晶圆。随着批量生产的开始,SiC晶圆路线图看起来非常有利。对于氮化镓材料,主要应用领域是面向低额定功率水平(1kv)的横向场效应管设计。电源模块的演示开始出现在科学报告和实际应用中。因此,简要回顾一下。SiC的其他优点是可以在高温(> 300°C)和辐射硬环境中工作,这可以提供相当大的系统优势。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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