Research of Influence of Materials Properties on Resonance Frequencies of Micromechanical Tuning Fork Gyroscope

2007 International Conference on Perspective Technologies and Methods in MEMS Design Pub Date : 2007-05-23 DOI:10.1109/MEMSTECH.2007.4283440

M. Lobur, A. Holovatyy

引用次数: 1

Abstract

In this paper the influence of materials properties on resonance frequencies is researched. It is shown how resonance drive and sense frequencies depend on material property.

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材料特性对微机械音叉陀螺仪共振频率的影响研究

本文研究了材料性能对谐振频率的影响。说明了共振驱动和感应频率与材料特性的关系。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2007 International Conference on Perspective Technologies and Methods in MEMS Design

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