Radiation induced thermally stimulated luminescence and conductivity in SIMOX oxides

Abstract

Thermally Stimulated Luminescence (TSL) and Conductivity (TSC) induced by X-ray irradiation in SIMOX buried oxides have been studied from room temperature up to 400/spl deg/C. The characteristics of an X-ray induced TSL glow peak detected around 62/spl deg/C are presented: specifically, results on the emission wavelength and trap depth are shown. The X-ray induced TSC, observed at approximately 70/spl deg/C, is due to the same trapped species responsible of the TSL emission. The stability after irradiation and dose dependence of both TSL and TSC signals have also been investigated. The results have been compared with similar studies on high temperature annealed thermal SiO/sub 2/ films and bulk materials.