Microlens testing: an application

Hooi Leng Ng-Lee, S. C. Goh, C. Ranjit, .. Maryanto, Jie Ying Sarah Ng, A. Asundi
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Abstract

A measurement system for measuring effective focal length of a microlens is presented. The system consists of a microprocessor controlled 3-axis stage with an optical system which provides 500 times magnification for focal length and diameter measurement. The focal length testing is carried out by single pass (transmission) approach. A point source from halogen white light is used as the object for the measurement. A CCD camera displays the magnified image on a computer. Focusing is performed by moving the microlens along the principal axis by manual control of a stepper motor and observation of the image on the computer. Similarly, moving the microlens along its substrate plane and capturing three points on its circumference gives its diameter. The co-ordinates of the 3-axis stage and diameter are displayed separately on dot-matrix LCD panel. Anti-backlash mechanisms are employed on all axes, each with a positioning resolution of 1 μm.
微透镜测试:一个应用
介绍了一种测量微透镜有效焦距的测量系统。该系统由一个微处理器控制的3轴平台和一个光学系统组成,该系统提供500倍的放大焦距和直径测量。焦距测试采用单通(透射)法进行。采用卤素白光点源作为测量对象。CCD相机将放大后的图像显示在计算机上。聚焦是通过手动控制步进电机沿主轴移动微透镜并在计算机上观察图像来完成的。类似地,沿着衬底平面移动微透镜,并在其周长上捕捉三个点,就得到了微透镜的直径。在点阵液晶屏上分别显示三轴台的坐标和直径。各轴均采用防隙机构,每个定位分辨率为1 μm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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