Hooi Leng Ng-Lee, S. C. Goh, C. Ranjit, .. Maryanto, Jie Ying Sarah Ng, A. Asundi
{"title":"Microlens testing: an application","authors":"Hooi Leng Ng-Lee, S. C. Goh, C. Ranjit, .. Maryanto, Jie Ying Sarah Ng, A. Asundi","doi":"10.1117/12.814595","DOIUrl":null,"url":null,"abstract":"A measurement system for measuring effective focal length of a microlens is presented. The system consists of a microprocessor controlled 3-axis stage with an optical system which provides 500 times magnification for focal length and diameter measurement. The focal length testing is carried out by single pass (transmission) approach. A point source from halogen white light is used as the object for the measurement. A CCD camera displays the magnified image on a computer. Focusing is performed by moving the microlens along the principal axis by manual control of a stepper motor and observation of the image on the computer. Similarly, moving the microlens along its substrate plane and capturing three points on its circumference gives its diameter. The co-ordinates of the 3-axis stage and diameter are displayed separately on dot-matrix LCD panel. Anti-backlash mechanisms are employed on all axes, each with a positioning resolution of 1 μm.","PeriodicalId":191475,"journal":{"name":"International Symposium on Laser Metrology","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-10-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Symposium on Laser Metrology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.814595","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A measurement system for measuring effective focal length of a microlens is presented. The system consists of a microprocessor controlled 3-axis stage with an optical system which provides 500 times magnification for focal length and diameter measurement. The focal length testing is carried out by single pass (transmission) approach. A point source from halogen white light is used as the object for the measurement. A CCD camera displays the magnified image on a computer. Focusing is performed by moving the microlens along the principal axis by manual control of a stepper motor and observation of the image on the computer. Similarly, moving the microlens along its substrate plane and capturing three points on its circumference gives its diameter. The co-ordinates of the 3-axis stage and diameter are displayed separately on dot-matrix LCD panel. Anti-backlash mechanisms are employed on all axes, each with a positioning resolution of 1 μm.