The effect of defect clustering on WASP device yields

C. Peacock, H. Bolouri
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引用次数: 2

Abstract

Monolithic wafer scale devices have many advantages over hybrid wafer scale devices, but continue to attract far less commercial interest. This is mainly due to the overheads associated with incorporating defect tolerance and re-configuration circuitry into large and complex designs. The WASP series of monolithic wafer scale massively parallel computers have overcome many of these obstacles by adopting a hierarchical defect tolerance strategy. The paper presents an analysis of the effect of defect clustering on the target WASP device yields. The yield model uses extrapolated parameters from earlier WASP devices. and assumes a 0.7 /spl mu/m process. The results show that the target WASP yield predictions are generally very high, and largely independent of defect clustering. However, for high defect densities and high harvest requirements, the predicted yields vary considerably depending on the degree of defect clustering.<>
缺陷聚类对WASP器件成品率的影响
单片晶圆规模器件比混合晶圆规模器件有许多优点,但仍然吸引较少的商业兴趣。这主要是由于将缺陷容忍度和重新配置电路纳入大型复杂设计的开销。WASP系列单片晶圆规模大规模并行计算机通过采用分层缺陷容忍策略克服了许多这些障碍。本文分析了缺陷聚类对目标WASP器件成品率的影响。产量模型使用早期WASP设备的外推参数。假设过程是0.7 /spl mu/m。结果表明,目标WASP产率预测通常非常高,并且在很大程度上与缺陷聚类无关。然而,对于高缺陷密度和高收获要求,预测产率根据缺陷聚类的程度而有很大差异。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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