Framework for a defect reduction program

Abstract

A framework for defect reduction is presented which integrates management commitment, a focused organizational structure, state-of-the-art defect detection and analysis tools, and cooperation between the organizations that affect the quality of the material shipped from a wafer fab line. Considerations for organizational design, the role of the defect reduction engineer, and the defect reduction strategy are presented along with specific defect density, and yield improvement examples.<>