Reduction of thermal load in the fabrication process of bifacial silicon solar cells

J. Coello, C. del Cañizo, A. Luque
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Abstract

With the aim of reducing the thermal load to obtain higher final bulk lifetimes, a new scheme for the fabrication of bifacial solar cells is proposed, in which masking thermal oxidations are replaced by SiN layer depositions. High final bulk lifetimes have been obtained thanks to the thermal load reduction, improving cell efficiencies. The process with SiN layers gives 14.6% when illuminated from the p+ side and 13.3% when illuminated from the n+ side for multicrystalline silicon of n-type,, and 16.2% and 16.7% when illuminated from p+ and n+ sides, respectively, for Cz-n silicon.
降低双面硅太阳能电池制造过程中的热负荷
为了降低热负荷以获得更高的最终体寿命,提出了一种双面太阳能电池的制造新方案,该方案用氮化硅层沉积代替掩盖热氧化。由于热负荷降低,提高了电池效率,获得了高最终体积寿命。对于n型多晶硅,当从p+侧照射时,采用SiN层的工艺可获得14.6%的光能,当从n+侧照射时可获得13.3%的光能,对于Cz-n硅,当从p+和n+侧照射时分别可获得16.2%和16.7%的光能。
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