Precise Positioning System and Potential Application in a “SMART Fab”

Abstract

In recent years, the “SMART Factory” concept is becoming common in the wafer fab industry. A truly “SMART Fab” has all the production systems connected and integrated real-time with automated material handling system to optimize all production resources. In this paper, the concept of adopting a precise positioning system in a wafer fab is being discussed. The functions of this positioning system and how it fits into the “SMART Fab” vision will be shared.