Influence of MOVPE growth conditions and substrate parameters on the structural quality of multi-period InGaAsP/InP MQW structures

F. Reier, C. Bornholdt, D. Hoffmann, F. Kappe, L. Morl
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Abstract

In this work we have investigated the MOVPE growth of multi-period InGaAsP/InP quantum confined Stark effect (QCSE) layer structures and provide evidence that the QCSE response can be influenced by optimizing the gas exchange procedure, mainly to minimize carry-over effects. Secondly, we present new results on the thermal stability behaviour of these MQW structures which appear to be strongly related with the underlying buffer layer and substrate material.
MOVPE生长条件和衬底参数对多周期InGaAsP/InP MQW结构质量的影响
在这项工作中,我们研究了多周期InGaAsP/InP量子受限斯塔克效应(QCSE)层结构的MOVPE生长,并提供了证据,证明QCSE响应可以通过优化气体交换程序来影响,主要是为了最小化结转效应。其次,我们提出了这些MQW结构的热稳定性行为的新结果,这些结构似乎与底层缓冲层和衬底材料密切相关。
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