{"title":"Thickness shear vibration of ZnO thin film with dissipation","authors":"Jianke Du, Xian Fu, J. Lou, Bin Huang, Ji Wang","doi":"10.1109/FCS.2016.7546735","DOIUrl":null,"url":null,"abstract":"Thickness shear vibration of ZnO thin film with consideration of viscosity effects is investigated. The Kelvin mode is used to describe the viscosity of the materials. Based on the three-dimensional piezoelectric theory, the governing equations of ZnO thin film are obtained. The calculation results are presented and discussed in detail.","PeriodicalId":122928,"journal":{"name":"2016 IEEE International Frequency Control Symposium (IFCS)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Frequency Control Symposium (IFCS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/FCS.2016.7546735","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Thickness shear vibration of ZnO thin film with consideration of viscosity effects is investigated. The Kelvin mode is used to describe the viscosity of the materials. Based on the three-dimensional piezoelectric theory, the governing equations of ZnO thin film are obtained. The calculation results are presented and discussed in detail.