Numerical modelling of mechanisms involved in latchup triggering by a laser beam

P. Fouillat, H. Lapuyade, A. Touboul, J. Dom, R. Gaillard
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引用次数: 15

Abstract

The use of a laser beam is a well-known technique to trigger latchup parasitic structures in ICs. Numerical analyses of this phenomenon are brought into play to study its sensitivity when a continuous wave laser as well as pulsed lasers are used. The impact location is also studied to demonstrate that different mechanisms are involved in the triggering phase of latchup. The structure is also more sensitive to the blue light when it is directed over the well-substrate junction while it is more sensitive to infrared light elsewhere. When using a CW laser, the curves giving the power supply current versus the photo-induced current provide direct information on the parameters of the parasitic structure.
激光锁闭触发机理的数值模拟
在集成电路中,使用激光束是一种众所周知的触发闭锁寄生结构的技术。利用数值分析方法研究了连续波激光器和脉冲激光器对该现象的敏感性。并对碰撞位置进行了研究,证明了不同的机理参与了闭锁触发阶段。该结构对蓝光也更敏感,当它被引导到井-衬底交界处时,而对其他地方的红外光更敏感。当使用连续波激光器时,给出电源电流和光感应电流的曲线提供了寄生结构参数的直接信息。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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