Piezoelectric micropump for lab-on-a-chip applications

Abstract

This paper describes an on-chip pumping system and the correspondent driving circuit. The system can be used in lab-on-a-chip applications for pumping the fluids in the microchannels. The device is constituted by two chips placed together: a CMOS chip with the electronics and a glass chip, with the microchannels and the pumping system. This pumping system, wich is the main subject of the article is based on piezoelectric polymer actuators.