An Analysis of Material Choices for Capacitive Microaccelerometers

2007 International Conference on Perspective Technologies and Methods in MEMS Design Pub Date : 2007-05-23 DOI:10.1109/MEMSTECH.2007.4283414

Y. Kushnir, V. Teslyuk, P. Turchenko

引用次数: 1

Abstract

In this paper, microaccelerometer sensitivity upon material admixtures has been considered. The ANSYS aided analysis allows proclamation of tuning possibilities for accelerometer development on stages before manufacturing.

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电容式微加速度计材料选择分析

本文考虑了微加速度计对材料外加剂的灵敏度。ANSYS辅助分析允许在制造前阶段宣布加速度计开发的调谐可能性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2007 International Conference on Perspective Technologies and Methods in MEMS Design

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