Flip chip for AMD K6 microprocessor

R. Master, M. Khan, Martin Guardado, O. Starr, E. Alcid, L. Khor
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引用次数: 6

Abstract

Flip-chip technology in the form of Controlled Collapse Connection (C4) was adopted for the AMD K6 microprocessor. The need arose from the pad limitations of wire-bond technology. The necessity of more pads for connectivity resulted in growth of die size. This would have impacted the net die per wafer and, therefore, the capacity of the wafer fabrication facilities. In addition, flip-chip technology afforded increased electrical performance. The paper describes the various materials/processes that were developed and qualified for manufacturing. The paper presents improvement to various traditional processes of flux application, flux cleaning, and underfill. The criterion used for the material and process development is described. In addition, reliability data are presented for two assembly sites, one in the US and the other in Malaysia. The data includes accelerated thermal cycles at two different conditions, and various underfill materials and cleaning methods. Also presented are the improvement to solder joint reliability due to use of underfill. In this particular application, it turned out to be at least 50X. The Malaysian facility is the first outside the United States to practice flip-chip technology in high-volume manufacturing for microprocessor application. This presented significant challenges in developing both equipment and support infrastructure. The paper concludes with a typical line layout of a high volume manufacturing line.
倒装芯片为AMD K6微处理器
AMD K6微处理器采用了可控折叠连接(C4)形式的倒装芯片技术。这种需求源于线键合技术的焊盘限制。需要更多的衬垫连接导致了模具尺寸的增长。这将影响每个晶圆的净晶片,因此,晶圆制造设施的能力。此外,倒装芯片技术提高了电气性能。本文描述了各种材料/工艺开发和合格的制造。本文对各种传统的助焊剂施用、助焊剂清洗和底填工艺进行了改进。描述了用于材料和工艺开发的准则。此外,本文还介绍了两个组装地点的可靠性数据,一个在美国,另一个在马来西亚。数据包括两种不同条件下的加速热循环,以及各种下填材料和清洗方法。此外,还介绍了下填料对焊点可靠性的提高。在这个特定的应用程序中,结果证明它至少是50倍。马来西亚工厂是美国以外第一家在微处理器应用的大批量生产中实践倒装芯片技术的工厂。这对开发设备和支助基础设施都提出了重大挑战。最后给出了一个典型的大批量生产线的生产线布局。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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