Dual Approach for the characterization of the thermal impedance using 3omega and thermoreflectance methods

Abstract

Two different methods were performed in order to fully characterize the thermal impedance ZTH of a micro heater sample of 5μm wide and 500μm length. The first measurement method proposed in this work was carried out using the Thermo Reflectance (TR) technique. The second one was performed using the 3 ω method. All the measurements ensure the extraction of the same RTH around 107°C/W. Moreover, a 3D finite elements simulation has been performed to validate the measurement approach. Finally, first TR results for a GaN HEMTof 8x50μm from UMS foundry are given in this paper.