High conformity sidewall ZnO nanorods via hydrothermal method

Abstract

High conformity sidewall ZnO nanorods are manufactured on etched Si by hydrothermal method. The temperature is fixed at 90 degree Celsius. The morphology of ZnO nanorods is examined by scanning electron microscopy. Also, the results show that we successfully spin coat ZnO seed layer on the sidewalls of grooves. Moreover, ZnO nanorods are grown in grooves of etched Si substrate.