Development and application of a low-cost manual micro assembly system with integrated heater

M. Kagerer, Kenji L. Eiler, F. Irlinger, T. Lüth
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引用次数: 4

Abstract

This paper describes the development and the application of a low-cost manual micro assembly system with an integrated heater. The presented system consists basically of a massive frame to dampen vibrations, of an observation unit, of a heating element with a 2-point temperature controller, and of an exchangeable vacuum gripper for the deposition of a work piece on a target substrate which is mounted and correctly aligned on a vacuum plate. During the development we place considerable value on a modular system which is easy to use, highly accurate, and cost-efficient. In this connection, we will point out the labor and machine maintenance as well as the material costs. Present micro assembly system only weighs 21 kg and has an engine room of 28 × 35 × 56 cm (length × width × height). This makes it suitable for easy transportation. So it can be installed and used in almost every location. Although the labor and machine maintenance as well as the material costs only amount to less than 9.900 € a positioning accuracy of ± 15 μm is achievable. The maximum tooling-up time depends on the required operating temperature.
低成本集成加热器人工微装配系统的开发与应用
本文介绍了一种低成本的集成加热器人工微装配系统的研制与应用。所提出的系统基本上包括一个巨大的框架,以抑制振动,一个观察单元,一个加热元件与两点温度控制器,以及一个可交换的真空夹具,用于沉积工件在目标基板上,该目标基板安装并正确对准真空板。在开发过程中,我们非常重视模块化系统,它易于使用,高度精确,并且具有成本效益。在这方面,我们将指出人工和机器维护以及材料成本。目前的微型装配系统仅重21公斤,机舱面积28 × 35 × 56厘米(长×宽×高)。这使得它适合于方便运输。所以它可以安装和使用在几乎每一个位置。虽然人工和机器维护以及材料成本仅低于9900欧元,但可以实现±15 μm的定位精度。最大上刀时间取决于所需的工作温度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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