{"title":"A novel laser triangulation technique for high precision distance measurement","authors":"D. S. Pierce, T. Ng, B. R. Morrison","doi":"10.1109/IAS.1992.244524","DOIUrl":null,"url":null,"abstract":"The authors describe an optical triangulation technique for noncontact distance measurement which yields high accuracy with a large depth of field and stand-off from the target. The theoretical error of this gauging technique is 0.5 mu m over a depth of field of 2 mm at distance of 100 mm from an optically rough target. The only limitation placed on the target surface is that it must diffuse a small amount of light. The gauge is also robust in the presence of vibration. An experimental gauge has been constructed using commercially available optical components, and its performance is described.<<ETX>>","PeriodicalId":110710,"journal":{"name":"Conference Record of the 1992 IEEE Industry Applications Society Annual Meeting","volume":"77 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1992-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"17","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Conference Record of the 1992 IEEE Industry Applications Society Annual Meeting","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IAS.1992.244524","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 17
Abstract
The authors describe an optical triangulation technique for noncontact distance measurement which yields high accuracy with a large depth of field and stand-off from the target. The theoretical error of this gauging technique is 0.5 mu m over a depth of field of 2 mm at distance of 100 mm from an optically rough target. The only limitation placed on the target surface is that it must diffuse a small amount of light. The gauge is also robust in the presence of vibration. An experimental gauge has been constructed using commercially available optical components, and its performance is described.<>