A novel laser triangulation technique for high precision distance measurement

D. S. Pierce, T. Ng, B. R. Morrison
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引用次数: 17

Abstract

The authors describe an optical triangulation technique for noncontact distance measurement which yields high accuracy with a large depth of field and stand-off from the target. The theoretical error of this gauging technique is 0.5 mu m over a depth of field of 2 mm at distance of 100 mm from an optically rough target. The only limitation placed on the target surface is that it must diffuse a small amount of light. The gauge is also robust in the presence of vibration. An experimental gauge has been constructed using commercially available optical components, and its performance is described.<>
高精度距离测量的新型激光三角测量技术
介绍了一种用于非接触距离测量的光学三角测量技术,该技术具有高精度、大景深和距目标距离等特点。该测量技术的理论误差为0.5 μ m,在距光学粗糙目标100毫米的距离上,视场深度为2mm。对目标表面的唯一限制是它必须漫射少量的光。该仪表在振动存在时也很坚固。使用市售光学元件构建了一个实验测量仪,并描述了其性能。
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