CIM Systems In An Advanced Semiconductor Factory

Abstract

The policies of CIM systems development and delivery in an advanced semiconductor factory are described, establishing a methodology for efficient production of a variety of devices. The implementation of CIM systems is expected to enhance total productivity in process and device engineering technology, wafer fabrication technology, and equipment efficiency. A dispatcher has been developed, and is presently evaluating the performance of WIP lot movements using production-line data. Production-line analysis tools are introduced and successfully utilized in quantitative analysis. A statistical fine control system (SFINCS) is developed to carry out process parameter optimization for the following lot. An expert system for fail-bit discrimination is developed. Detailed, accurate, and rapid pattern discrimination of fail-bit data is achieved.