Structural Optimization of an Electrothermal Chevron V-Shape Microactuator Device

Abstract

In this paper, the optimization of a chevron V-shape microactuator device to achieve higher actuation force and displacement is discussed. General information approach that includes the description of a physical model used in order to analyze the device behavior and the optimization of its design is considered. Shuttle and beams of a conventional electrothermal chevron V-shape microactuator device were modified. Pneumatic microactuators were implemented along the shuttle. The device was designed with silicon material. The device was characterized through a coupled electro-thermomechanical analysis using ANSYS-Workbench. Compared to the conventional chevron V-shape microactuator, the output work of the improved microactuator shows an increment of about 50% in displacement and 40% in actuation force, at the same maximum temperature source applied. A microgripper is developed are immediate application.