MEMS in RF Filter Applications: Thin‐film Bulk Acoustic Wave Technology

Abstract

RF-MEMS filters will replace conventional filters in mobile communication as they offer better performance at lower cost. Requirements and key performance parameters for filters in next-generation mobile applications are reviewed in detail. The fundamentals of RF-MEMS filters — and in particular thin-film bulk acoustic wave (BAW) filters — are summarized in a comprehensive form. The state-of-the-art in BAW filters and future trends are presented. Supplementary information covers manufacturing and commercialization issues.