Analysis and experiment of a novel linear micro ultrasonic motor based on shear vibration mode

Abstract

A novel linear micro ultrasonic motor, which is actuated based on shear stress mode (d15 converse piezoelectric effect), is presented. Firstly shear vibration mode of piezoelectric stator is analyzed. The elliptical trajectory of driving point on the stator induced by shear vibration modes is discussed. Then the dynamical analysis of piezoelectric stator is carried out, and the complete structure design for the proposed linear micro ultrasonic motor ultrasonic motor is given. Finally the prototype is manufactured, and the mode experiment of piezoelectric stator is conducted. The experimental results show that the calculated vibration modes can be excited successfully.