A new WLR method based on model parameter analysis

T. Zimmer, J. Duluc, N. Milet, J. Dom
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引用次数: 2

Abstract

An approach which identifies key disturbances which cause bipolar model parametric variations and correlation is presented. Model parameters, expressed as a function of technological data, are analyzed through a straightforward correlation study. Combining these results the key process variables fluctuation which causes circuit performance changes can be isolated. This methodology which links model parameter and circuit performance to process quantities, is a benefit to both device manufacturers and end users.
一种基于模型参数分析的WLR新方法
提出了一种识别引起双极模型参数变化和相关的关键干扰的方法。模型参数表示为技术数据的函数,通过直接的相关性研究进行分析。结合这些结果,可以隔离导致电路性能变化的关键过程变量波动。这种方法将模型参数和电路性能与工艺数量联系起来,对设备制造商和最终用户都有好处。
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