Dual SAW oscillator for low SO/sub 2/ concentrations measurement

1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings Pub Date : 1996-10-09 DOI:10.1109/SMICND.1996.557320

E. Bodea, I. Blaga, R. Apostolescu, P. Schiopu

引用次数: 0

Abstract

A device for surface acoustic wave (SAW) measurements, based on an organic sensitive film, that is triethanolamine (TEA), has been realized. A dual SAW oscillator was used to measure the frequency shift due to gas adsorption in the TEA film. A linear response was obtained in the range 0-100 ppm SO/sub 2/ and the sensibility was about 80 Hz/ppm.

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双SAW振荡器低SO/sub 2/浓度测量

研制了一种基于三乙醇胺(TEA)有机敏感膜的表面声波(SAW)测量装置。用双声表面波振荡器测量了由于气体吸附在TEA膜中的频移。在0 ~ 100 ppm SO/sub 2/范围内获得线性响应，灵敏度约为80 Hz/ppm。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

1996 International Semiconductor Conference. 19th Edition. CAS'96 Proceedings

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