A laser based system for tape automated bonding to integrated circuits

P. Spletter, R. Crowley
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引用次数: 15

Abstract

A laser-based process has been developed to bond tape automated bonding (TAB) leads to integrated circuit pads. This technology has many distinct advantages over conventional TAB bonding techniques, such as gang thermode bonding and single-point thermosonic bonding. TAB laser bonding is performed by positioning a focused laser beam over a lead and then pulsing the laser once, creating a reliable metallurgical bond between the plated lead and the bump. This bonding process takes advantage of a thin tin plating to absorb the laser energy and accelerate melting of the lead and bump materials. The resulting bond, which is composed of copper and gold, has withstood exposure to damaging environments. The laser-bonding equipment consists of a pseudo-pulsed Nd:YAG laser, a high-performance laser-beam positioner, a four-axis die pedestal, and a system control computer. The laser-beam positioner and laser-pulse parameters are software-controlled. The part's alignment and bonding positions are stored in a data file, and product changeover is accomplished by reading in the new product data file. The system can bond over 60 leads per second and is ideal for bonding high-pad-count or stress-sensitive integrated circuits.<>
一种基于激光的磁带自动粘接到集成电路的系统
开发了一种基于激光的粘接带自动粘接(TAB)导联集成电路衬垫的工艺。与传统的TAB键合技术相比,该技术具有许多明显的优势,例如组热模键合和单点热声键合。TAB激光键合是通过将聚焦激光束定位在铅上,然后对激光进行一次脉冲,在镀铅和凸块之间建立可靠的冶金键合来实现的。这种结合过程利用了薄锡镀层来吸收激光能量,加速铅和碰撞材料的熔化。这种由铜和金组成的键可以经受住环境的破坏。该激光键合设备由伪脉冲Nd:YAG激光器、高性能激光束定位器、四轴模座和系统控制计算机组成。激光束定位器和激光脉冲参数由软件控制。零件的对中和粘接位置存储在数据文件中,产品转换通过读入新的产品数据文件来完成。该系统每秒可以连接超过60根引线,是连接高焊盘计数或应力敏感集成电路的理想选择。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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CiteScore
3.10
自引率
0.00%
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