Preparation of graphene oxide composited zinc oxide films by electrostatic spray deposition for humidity sensors

T. Thiwawong, Thitiwat Maboonchauy, K. Onlaor, B. Tunhoo
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Abstract

This work aimed to study the preparation of graphene oxide (GO) and zinc oxide (ZnO) composited films by electrostatic spray deposition for use in fabricated humidity sensors. The physical properties of prepared films were examined with X-ray diffraction, Raman spectroscopy, and scanning electron microscope. Subsequently, a humidity sensor was fabricated using a low-cost interdigitated electrode pattern with the print circuit board. The humidity sensing behaviors were assessed with fixed humidity levels in a saturated aqueous salt solution in the humidity range of 11 – 93%RH. The impedance value of the device was obtained with a precision LCR meter. It was found that the composited film of 0.50 %wt. GO demonstrated the highest humidity response with optimized humidity sensitivity, hysteresis error, and response/recovery times of 2.68 ´ 103, 4.89%, and 228/19 s, respectively. Moreover, the equivalent circuits for the prepared device at various humidity levels were acquired with impedance spectroscopy to propose the mechanism for the humidity sensing of the device.
静电喷雾沉积法制备湿度传感器用氧化石墨烯复合氧化锌薄膜
本工作旨在研究静电喷雾沉积法制备氧化石墨烯(GO)和氧化锌(ZnO)复合薄膜,用于制造湿度传感器。用x射线衍射、拉曼光谱和扫描电镜对制备膜的物理性质进行了表征。随后,采用低成本的交叉电极模式与印刷电路板制作了湿度传感器。在11 - 93%相对湿度范围内的饱和盐水溶液中,用固定的湿度水平来评估湿度传感行为。用精密LCR计测量了器件的阻抗值。结果表明,复合膜质量分数为0.50%。氧化石墨烯的湿度响应最高,优化后的湿度灵敏度、滞后误差和响应/恢复时间分别为2.68´103、4.89%和228/19 s。此外,利用阻抗谱法获得了所制备器件在不同湿度水平下的等效电路,提出了该器件的湿度传感机理。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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