Qualitative assessment of epitaxial graphene FETs on SiC substrates via pulsed measurements and temperature variation

C. Mukherjee, S. Frégonèse, T. Zimmer, C. Maneux, H. Happy, David Mele
{"title":"Qualitative assessment of epitaxial graphene FETs on SiC substrates via pulsed measurements and temperature variation","authors":"C. Mukherjee, S. Frégonèse, T. Zimmer, C. Maneux, H. Happy, David Mele","doi":"10.1109/ESSDERC.2014.6948821","DOIUrl":null,"url":null,"abstract":"In this paper, we report a qualitative study on the performances of Graphene on SiC FETs from pulsed measurements as a function of temperature variation, reflecting on the process quality of the graphene FETs. Currents and transconductances in both pulsed and DC measurements as a function of temperature in the 25°C to 75°C range do not show any significant variation which indicates a trap-free interface and good graphene quality as well as thermal stability. In order to get a complete picture, scattering parameters from pulsed measurements are also given and the extracted gate capacitances and resistances, cut-off frequencies and fMAX are shown at different temperatures. As a whole, our study illustrates the stability, robustness and applicability of this graphene technology for future high performance electronics.","PeriodicalId":262652,"journal":{"name":"2014 44th European Solid State Device Research Conference (ESSDERC)","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-11-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 44th European Solid State Device Research Conference (ESSDERC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSDERC.2014.6948821","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2

Abstract

In this paper, we report a qualitative study on the performances of Graphene on SiC FETs from pulsed measurements as a function of temperature variation, reflecting on the process quality of the graphene FETs. Currents and transconductances in both pulsed and DC measurements as a function of temperature in the 25°C to 75°C range do not show any significant variation which indicates a trap-free interface and good graphene quality as well as thermal stability. In order to get a complete picture, scattering parameters from pulsed measurements are also given and the extracted gate capacitances and resistances, cut-off frequencies and fMAX are shown at different temperatures. As a whole, our study illustrates the stability, robustness and applicability of this graphene technology for future high performance electronics.
通过脉冲测量和温度变化对SiC衬底外延石墨烯场效应管进行定性评价
在本文中,我们报道了一项定性研究,从脉冲测量中,石墨烯在碳化硅场效应管上的性能作为温度变化的函数,反映了石墨烯场效应管的工艺质量。在25°C至75°C的温度范围内,脉冲和直流测量中的电流和跨导没有显示出任何显着变化,这表明无陷阱界面和良好的石墨烯质量以及热稳定性。为了得到一个完整的图像,还给出了脉冲测量的散射参数,并给出了在不同温度下提取的栅极电容和电阻、截止频率和fMAX。总的来说,我们的研究说明了这种石墨烯技术在未来高性能电子产品中的稳定性、稳健性和适用性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信