Single mask lateral tunneling accelerometer

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Pub Date : 1998-01-25 DOI:10.1109/MEMSYS.1998.659779

Peter G. Hartwell, Fred Bertsch, S. A. Miller, Kimberly L. Turner, Noel C. MacDonald

引用次数: 34

Abstract

A single-mask lateral tunneling accelerometer with integrated tip has been developed and characterized. High aspect ratio single-crystal silicon springs provide high resolution, wide operating bandwidth, and excellent isolation from off-axis stimuli. In this paper, we present the first such device implementing the SCREAM (1994) process technology. We focus on the advantages that this technology affords tunneling accelerometers and present a typical high-resolution accelerometer with 20 /spl mu/g/rt Hz performance at 100 Hz and 5.5 kHz resonant frequency.

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单掩模横向隧道加速度计

研制了一种集成尖端的单掩模横向隧道加速度计，并对其进行了表征。高纵横比单晶硅弹簧提供高分辨率，宽工作带宽，并从离轴刺激极好的隔离。在本文中，我们提出了第一个这样的装置实现尖叫(1994)工艺技术。我们专注于该技术为隧道加速度计提供的优势，并提出了一种典型的高分辨率加速度计，在100 Hz和5.5 kHz谐振频率下具有20 /spl mu/g/rt Hz的性能。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176

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