Thermal deformation analysis on flip-chip packages using high resolution moire interferometry

Guotao Wang, Jie-Hua Zhao, Min Ding, P. Ho
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引用次数: 31

Abstract

Solder reliability has been an issue with many fine-pitch, area-array packages because of the large thermal expansion (CTE) mismatch between the silicon die and the substrate. One solution to flip-chip plastic ball grid array (FCPBGA) package is to underfill the solder bumps to improve the reliability by reducing the solder bump shear stresses. However, for an underfilled flip-chip package, large thermal stresses will develop along the solder bump-underfill during thermal cycling due to the materials discontinuity. Delamination along the die-underfill interface has often been found in reliability test. In this study, high-resolution moire interferometry was used to investigate the thermal deformations for some experimental flip-chip packages. Experimental details of high-resolution moire interferometry are presented. Using a phaseshift technique, the resolution of moire interferometry is achieved at 26 nm per fringe order. Displacement and, especially, the strain distribution can be obtained accurately at this resolution. This experimental technique can analyze deformations with small features, such as the C4 bumps and high density interconnect (HDI) structure. Experimental results for HDI FCPBGA packages are presented and discussed.
用高分辨率云纹干涉法分析倒装芯片封装的热变形
由于硅芯片和衬底之间存在较大的热膨胀(CTE)失配,许多细间距、面积阵列封装的焊料可靠性一直是一个问题。倒装芯片塑料球栅阵列封装(FCPBGA)的一种解决方案是在焊点凸点处进行下填充,通过降低焊点凸点的剪切应力来提高可靠性。然而,对于欠填充的倒装芯片封装,由于材料的不连续性,在热循环过程中沿焊料凸起-欠填充会产生较大的热应力。在可靠性试验中经常发现沿模-底-填料界面的分层现象。在本研究中,采用高分辨率云纹干涉测量法研究了一些实验性倒装芯片封装的热变形。介绍了高分辨率云纹干涉测量的实验细节。采用移相技术,云纹干涉测量的分辨率达到每条纹级26 nm。在这个分辨率下,位移,特别是应变分布可以精确地得到。该实验技术可以分析C4凸起和高密度互连(HDI)结构等小特征的变形。给出并讨论了HDI FCPBGA封装的实验结果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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