Achieving greater on-wafer S-parameter accuracy with the LRM calibration technique

Abstract

Since the Introduction of microwave wafer probing In 1983 the dominant vector network analyzer calibration technique has been the short-open-load-thru (SOLT). The thru-reflect-line (TRL) technique has also been used In certain applications, and both approaches have enabled valuable measurements to be made with relative ease and a high degree of accuracy. Each technique, however, has drawbacks which may hinder accuracy or prevent certain applications. A new method,' line-reflect-match (LRM), circumvents many of these drawbacks, thereby allowing a more accurate and more versatile on-wafer calibration. In addition, LRM is simpler to perform because it requires fewer standards.