M. S. Kyruata, S. Revo, M. Melnichenko, K. Ivanenko, K. Svezhentsova
{"title":"Surface modification and creation of nano-objects for nanoelectronics","authors":"M. S. Kyruata, S. Revo, M. Melnichenko, K. Ivanenko, K. Svezhentsova","doi":"10.1109/ELNANO.2017.7939731","DOIUrl":null,"url":null,"abstract":"The practical use of a scanning tunneling microscope for modifying the sample surface and for creation of nano-objects on the sample surface is shown. The possibility of modification of the sample surface by tunneling current was shown. Nano-objects on the surface of the experimental samples were created using contact and non-contact modification of surface. This may also enable preparation of the surface for subsequent applications in which it is necessary to reduce the average irregularities of the surface.","PeriodicalId":333746,"journal":{"name":"2017 IEEE 37th International Conference on Electronics and Nanotechnology (ELNANO)","volume":"50 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE 37th International Conference on Electronics and Nanotechnology (ELNANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ELNANO.2017.7939731","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The practical use of a scanning tunneling microscope for modifying the sample surface and for creation of nano-objects on the sample surface is shown. The possibility of modification of the sample surface by tunneling current was shown. Nano-objects on the surface of the experimental samples were created using contact and non-contact modification of surface. This may also enable preparation of the surface for subsequent applications in which it is necessary to reduce the average irregularities of the surface.